02069nam a2200373 a 4500001001400000003000700014005001700021008004100038020001800079020001500097039009200112040000800204090002400212111003800236245027000274246001300544260005800557300003600615490005400651500018700705504005200892650005600944650009201000650007801092650002701170650003101197650002801228700001901256710007701275830005401352952013501406999002701541999012701568vtls000060025KUKTEM20251125093311.0120522t2007    paua   f b    101 0 eng d  a9781558999473  a1558999477 9a201710021127bAUTHORITYc201211281545dfauzic201211281538dfauziy201205221525zsafura  aUMP  aTK7871.85 .A38 20072 aAdvanced Metallization Conference10aAdvanced Metallization Conference 2006 (AMC 2006) :bproceedings ... of ... the conferences held October 17-19, 2006, in San Diego, California, U.S.A. and September 26-27, 2006,  at the University of Tokyo, Tokyo, Japan /ceditors: Stephen W. Russell   ... [et al.]30aAMC 2006  aWarrendale, Pa. :bMaterials Research Society,cc2007  axxii, 693  p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedings  aThis combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p.  aIncludes bibliographical references and indexes 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aRussell, S. W.2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings  00104070a20000b20000d2019-09-04g336.49l0oTK7871.85 .A38 2007p0000068300r2019-09-04 00:00:00t1v336.49w2019-09-04yOPEN  aVIRTUA40c63392d63398  aVTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7100*8300*9992