@book{63590,
	author = {Chabert, Pascal, and Braithwaite, Nicholas},
	title = {Physics of radio-frequency plasmas /},
	publisher = {Cambridge University Press,},
	year = {2011},
	address = {Cambridge, UK :},
	url = {http://www.loc.gov/catdir/enhancements/fy1208/2010042728-t.html}
}