Chabert, Pascal,  1969- <br/><br/>
Physics of radio-frequency plasmas / 
Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University 
 - Cambridge, UK :  Cambridge University Press,  2011 
 - viii, 385 pages :  ill. ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index 
<br/><br/><label>ISBN: </label>9780521763004 0521763002 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Low temperature plasmas<br/>Radio frequency