01509nam a2200289 a 4500 vtls000062521 KUKTEM 20251125093323.0 120619t2011 xxkda f 001 0 eng d 9780521763004 0521763002 201302141436 saini 201206191535 safura UMP TA2020 .C43 2011 Chabert, Pascal, 1969- Physics of radio-frequency plasmas / Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University Cambridge, UK : Cambridge University Press, 2011 viii, 385 pages : ill. ; 26 cm. Includes bibliographical references and index Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index Low temperature plasmas Radio frequency Braithwaite, Nicholas (Nicholas St. J.) Table of contents only http://www.loc.gov/catdir/enhancements/fy1208/2010042728-t.html Contributor biographical information http://www.loc.gov/catdir/enhancements/fy1208/2010042728-b.html 0 0 0 0 20000 20000 2019-09-04 281.76 0 TA2020 .C43 2011 0000070270 2026-02-05 13:50:43 1 281.76 2019-09-04 OPEN VIRTUA40 63590 63596 VTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*5050*6500*6501*7000*8560*8561*9992