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  <titleInfo>
    <title>Physics of radio-frequency plasmas</title>
  </titleInfo>
  <name type="personal">
    <namePart>Chabert, Pascal</namePart>
    <namePart type="date">1969-</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
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  <name type="personal">
    <namePart>Braithwaite, Nicholas (Nicholas St. J.)</namePart>
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  <originInfo>
    <place>
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    <place>
      <placeTerm type="text">Cambridge, UK</placeTerm>
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    <publisher>Cambridge University Press</publisher>
    <dateIssued>2011</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>viii, 385 pages : ill. ; 26 cm.</extent>
  </physicalDescription>
  <tableOfContents>Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index</tableOfContents>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Low temperature plasmas</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Radio frequency</topic>
  </subject>
  <identifier type="isbn">9780521763004</identifier>
  <identifier type="isbn">0521763002</identifier>
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