TY  - BOOK
AU  - Chabert,Pascal
AU  - Braithwaite,Nicholas
TI  - Physics of radio-frequency plasmas
SN  - 9780521763004
PY  - 2011///
CY  - Cambridge, UK
PB  - Cambridge University Press
KW  - Low temperature plasmas
KW  - Radio frequency
N1  - Includes bibliographical references and index; Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
UR  - http://www.loc.gov/catdir/enhancements/fy1208/2010042728-t.html
UR  - http://www.loc.gov/catdir/enhancements/fy1208/2010042728-b.html
ER  -