Gate stack and silicide issues in silicon processing :  symposium held April 25-27, 2000, San Francisco, California, U.S.A. / 
editors L.A. Clevenger ... [et al.] 
 - Warrendale, Pa. :  Materials Research Society,  2001 
 - 1 v. (various pagings) :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 611 .
 - Materials Research Society symposium proceedings ;  v. 611 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558995192 1558995196 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Silicides--Congresses<br/>Gate array circuits--Congresses<br/>Electric leakage--Congresses