TY  - BOOK
AU  - Clevenger,L.A.
TI  - Gate stack and silicide issues in silicon processing: symposium held April 25-27, 2000, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558995192
PY  - 2001///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Congresses
KW  - Silicides
KW  - Gate array circuits
KW  - Electric leakage
N1  - Includes bibliographical references and indexes
ER  -