@book{63757,
	author = {Demkov, Alexander A. and Materials Research Society. and Symposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications"},
	title = {CMOS gate-stack scaling-- materials, interfaces and reliability implications :},
	publisher = {Materials Research Society,},
	year = {2009},
	series = {Materials Research Society symposium proceedings},
	address = {Warrendale, Pa. :},
	note = {" ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface}
}