01461nam a2200277 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245019700120260005700317300003500374490006200409500019600471504005200667650005800719650005400777650002600831650003600857700002500893710007400918711012900992830006201121vtls000060670KUKTEM20251125093332.0120531t2009    paua   f      001 0 eng d  a9781605111285  a1605111287  aUMP00aCMOS gate-stack scaling-- materials, interfaces and reliability implications :bsymposium held April 14-16, 2009, San Francisco, California, U.S.A. /ceditors, Alexander A. Demkov ... [et al.]  aWarrendale, Pa. :bMaterials Research Society,c2009  aviii, 179 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedingsvv. 1155  a" ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface  aIncludes bibliographical references and indexes 0aMetal oxide semiconductors, ComplementaryvCongresses 0aMetal oxide semiconductorsxMaterialsvCongresses 0aSilicidesvCongresses 0aGate array circuitsvCongresses1 aDemkov, Alexander A.2 aMaterials Research Society.bMeetingd(2009 :cSan Francisco, Calif.)2 aSymposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications"d(2009 :cSan Francisco, Calif.) 0aMaterials Research Society symposium proceedingsvv. 1155