TY  - BOOK
AU  - Demkov,Alexander A.
ED  - Materials Research Society.
ED  - Symposium C, "CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications"
TI  - CMOS gate-stack scaling-- materials, interfaces and reliability implications: symposium held April 14-16, 2009, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781605111285
PY  - 2009///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Metal oxide semiconductors, Complementary
KW  - Congresses
KW  - Metal oxide semiconductors
KW  - Materials
KW  - Silicides
KW  - Gate array circuits
N1  - " ... Symposium C, ’CMOS Gate-Stack Scaling-- Materials, Interfaces and Reliability Implications,’ held April 14-16 at the 2009 MRS Spring Meeting in San Francisco, California" -- Preface; Includes bibliographical references and indexes
ER  -