Control technologies for emerging micro and nanoscale systems / 
editor by Evangelos Eleftheriou and S.O. Reza Moheimani 
 - Berlin,Germany ;  Springer Verlag,  2011 
 - xv, 287 p. :  ill. (some col.) ;  24 cm. 
 - Lecture notes in control and information sciences,  413  0170-8643 ; .
 - Lecture notes in control and information sciences ;  413 .
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9783642221729 (alk. paper) 3642221726 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Automatic control<br/>Microscopy