00881nam a2200241 a 4500001001400000003000700014005001700021008004100038020003100079020002800110040000800138245012500146260004500271300004500316490007300361500001900434650003500453650002200488650001500510700002700525700002600552830006100578vtls000064344KUKTEM20251125093340.0120928t2011    gw a   g i    001 0 eng d  a9783642221729 (alk. paper)  a3642221726 (alk. paper)  aUMP00aControl technologies for emerging micro and nanoscale systems /ceditor by Evangelos Eleftheriou and S.O. Reza Moheimani  aBerlin,Germany ;bSpringer Verlag,c2011  axv, 287 p. :bill. (some col.) ;c24 cm.1 aLecture notes in control and information sciences,x0170-8643 ;v413  aIncludes index 0aMicroelectromechanical systems 0aAutomatic control 0aMicroscopy1 aEleftheriou, Evangelos1 aMoheimani, S. O. Reza 0aLecture notes in control and information sciences ;v413