01120nam a2200289 a 4500 vtls000064344 KUKTEM 20251125093340.0 120928t2011 gw a g i 001 0 eng d 9783642221729 (alk. paper) 3642221726 (alk. paper) 201302181502 safura 201209281625 safura UMP TJ213 .C66 2011 Control technologies for emerging micro and nanoscale systems / editor by Evangelos Eleftheriou and S.O. Reza Moheimani Berlin,Germany ; Springer Verlag, 2011 xv, 287 p. : ill. (some col.) ; 24 cm. Lecture notes in control and information sciences, 0170-8643 ; 413 Includes index Microelectromechanical systems Automatic control Microscopy Eleftheriou, Evangelos Moheimani, S. O. Reza Lecture notes in control and information sciences ; 413 0 0 0 0 20000 20000 2019-09-04 301.53 0 TJ213 .C66 2011 0000070334 2019-09-04 00:00:00 1 301.53 2019-09-04 OPEN VIRTUA40 63880 63886 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*6500*6501*6502*7000*7001*8300*9992