TY  - BOOK
AU  - Eleftheriou,Evangelos
AU  - Moheimani,S.O.Reza
TI  - Control technologies for emerging micro and nanoscale systems
T2  - Lecture notes in control and information sciences,
SN  - 9783642221729 (alk. paper)
PY  - 2011///
CY  - Berlin,Germany
PB  - Springer Verlag
KW  - Microelectromechanical systems
KW  - Automatic control
KW  - Microscopy
N1  - Includes index
ER  -