01696nam a2200325 a 4500 vtls000059950 KUKTEM 20251125093351.0 120522t1996 paua f b 001 0 eng d 9781558993419 155899341X 201212051647 Fida 201211301149 fauzi 201205221103 safura 201205221103 safura UMP TK7874.76 .A38 1996 Advanced metallization and interconnect systems for ULSI applications in 1995 : proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan / editors, Russell C. Ellwanger, Shi-Qing Wang Pittsburgh, Pa. : Materials Research Society, c1996 xix, 767 p. : ill. ; 24 cm. Conference proceedings, 1048-0854 Includes bibliographical references and indexes Integrated circuits Ultra large scale integration Design and construction Congresses Vapor-plating Congresses Electrochemical metallizing Congresses Dielectrics Congresses Titanium nitride Congresses Ellwanger, Russell C. Wang, Shi-Qing University of California, Berkeley. Continuing Education in Engineering Materials Research Society conference proceedings 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7874.76 .A38 1996 0000068315 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 64054 64060 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7001*7100*8300*9992