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  <titleInfo>
    <title>Advanced metallization and interconnect systems for ULSI applications in 1995</title>
    <subTitle>proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Ellwanger, Russell C.</namePart>
  </name>
  <name type="personal">
    <namePart>Wang, Shi-Qing</namePart>
  </name>
  <name type="corporate">
    <namePart>University of California, Berkeley</namePart>
    <namePart>Continuing Education in Engineering</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
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  <originInfo>
    <place>
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    <place>
      <placeTerm type="text">Pittsburgh, Pa</placeTerm>
    </place>
    <publisher>Materials Research Society</publisher>
    <dateIssued>c1996</dateIssued>
    <dateIssued encoding="marc">1996</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xix, 767 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">editors, Russell C. Ellwanger, Shi-Qing Wang</note>
  <note>Includes bibliographical references and indexes</note>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
    <topic>Ultra large scale integration</topic>
    <topic>Design and construction</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Vapor-plating</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Electrochemical metallizing</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Dielectrics</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Titanium nitride</topic>
    <topic>Congresses</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Materials Research Society conference proceedings</title>
    </titleInfo>
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  <identifier type="isbn">9781558993419</identifier>
  <identifier type="isbn">155899341X</identifier>
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