TY  - BOOK
AU  - Ellwanger,Russell C.
AU  - Wang,Shi-Qing
ED  - University of California, Berkeley.
TI  - Advanced metallization and interconnect systems for ULSI applications in 1995: proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan 
T2  - Conference proceedings,
SN  - 9781558993419
PY  - 1996///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Design and construction
KW  - Congresses
KW  - Vapor-plating
KW  - Electrochemical metallizing
KW  - Dielectrics
KW  - Titanium nitride
N1  - Includes bibliographical references and indexes
ER  -