01843nam a2200337 a 4500001001400000003000700014005001700021008004100038020001800079020001500097039008800112040000800200090002400208245041300232260005800645300003400703490003900737504005200776650009200828650003000920650004400950650002800994650003301022700002601055700001901081710007701100830005401177952013501231999002701366999011201393vtls000059950KUKTEM20251125093351.0120522t1996    paua   f b    001 0 eng d  a9781558993419  a155899341X 9a201212051647bFidac201211301149dfauzic201205221103dsafuray201205221103zsafura  aUMP  aTK7874.76 .A38 199600aAdvanced metallization and interconnect systems for ULSI applications in 1995 :bproceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan /ceditors, Russell C. Ellwanger, Shi-Qing Wang  aPittsburgh, Pa. :bMaterials Research Society,cc1996  axix, 767 p. :bill. ;c24 cm.1 aConference proceedings,x1048-0854  aIncludes bibliographical references and indexes 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aVapor-platingvCongresses 0aElectrochemical metallizingvCongresses 0aDielectricsvCongresses 0aTitanium nitridevCongresses1 aEllwanger, Russell C.1 aWang, Shi-Qing2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings  00104070a20000b20000d2019-09-04g107.07l0oTK7874.76 .A38 1996p0000068315r2019-09-04 00:00:00t1v107.07w2019-09-04yOPEN  aVIRTUA40c64054d64060  aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7001*7100*8300*9992