00935nam a2200229 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245016900120260005800289300003300347490007500380504005200455650004400507650003100551650003400582700002700616830006200643vtls000060546KUKTEM20251125093358.0120529t1991    paua   f b    101 0 eng d  a9781558990968  a1558990968  aUMP00aChemical perspectives of microelectronic materials II :bsymposium held November 26-28, 1990, Boston, Massachusetts, U.S.A. /ceditors, L.V. Interrante ... [et al.]  aPittsburgh, Pa. :bMaterials Research Society,cc1991  axv, 584 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings,x0272-9172 ;vv. 204  aIncludes bibliographical references and indexes 0aMicroelectronicsxMaterialsvCongresses 0aSemiconductorsvCongresses 0aSurface chemistryvCongresses1 aInterrante, Leonard V. 0aMaterials Research Society symposia proceedings ;vv. 204