TY  - BOOK
AU  - Interrante,Leonard V.
TI  - Chemical perspectives of microelectronic materials II: symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings,
SN  - 9781558990968
PY  - 1991///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Microelectronics
KW  - Materials
KW  - Congresses
KW  - Semiconductors
KW  - Surface chemistry
N1  - Includes bibliographical references and indexes
ER  -