Chemical perspectives of microelectronic materials :  symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A. / 
editors, Míhal E. Gross, Joseph M. Jasinski, John T. Yates, Jr. 
 - Pittsburgh, Pa. :  Materials Research Society,  c1989 
 - xv, 642 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 131 .
 - Materials Research Society symposia proceedings ;  v. 131 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558990043 1558990046 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials--Congresses<br/>Semiconductors--Congresses<br/>Surface chemistry--Congresses