01016nam a2200253 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245020200120260005800322300003300380490006300413504005200476650004400528650003100572650003400603700002000637700002400657700001900681830006200700vtls000060545KUKTEM20251125093358.0120529t1989    paua   f b    101 0 eng d  a9781558990043  a1558990046  aUMP00aChemical perspectives of microelectronic materials :bsymposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A. /ceditors, Míhal E. Gross, Joseph M. Jasinski, John T. Yates, Jr.  aPittsburgh, Pa. :bMaterials Research Society,cc1989  axv, 642 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 131  aIncludes bibliographical references and indexes 0aMicroelectronicsxMaterialsvCongresses 0aSemiconductorsvCongresses 0aSurface chemistryvCongresses1 aGross, Mihal E.1 aJasinski, Joseph M.1 aYates, John T. 0aMaterials Research Society symposia proceedings ;vv. 131