Sarkar, Jaydeep <br/><br/>
Sputtering materials for VLSI and thin film devices / 
Jaydeep Sarkar 
 - Norwich, N.Y. :  William Andrew,  2014 
 - x, 603 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780815515937 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Flat panel displays--Materials<br/>Microelectronics--Materials<br/>Sputtering (Physics)