TY  - BOOK
AU  - Sarkar,Jaydeep
TI  - Sputtering materials for VLSI and thin film devices
SN  - 9780815515937
PY  - 2014///
CY  - Norwich, N.Y.
PB  - William Andrew
KW  - Flat panel displays
KW  - Materials
KW  - Microelectronics
KW  - Sputtering (Physics)
N1  - Includes bibliographical references and index
ER  -