TY - BOOK AU - Chuan,Seng Tan AU - Chen,Kuan-Neng AU - Koester,Steven J. TI - 3D integration for VLSI systems SN - 9789814303811 PY - 2012/// CY - Singapore PB - Pan Stanford Pub. KW - Three-dimensional integrated circuits N1 - Includes bibliographical references and index ER -