@book{64415,
	author = {Advanced Metallization Conference and McKerrow, Andrew J. and University of California, Berkeley.},
	title = {Advanced Metallization Conference 2001 (AMC 2001) :},
	publisher = {Materials Research Society,},
	year = {c2002},
	series = {Materials Research Society conference proceedings,},
	address = {Warrendale, Pa. :}
}