Advanced metallization for ULSI applications in 1993 :  proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / 
editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike 
 - Pittsburgh, PA :  Materials Research Society,  c1994 
 - xv, 611 p. :  ill. ;  24 cm. 
 - Materials Research Society conference proceedings,  1048-0854 .
 - Materials Research Society conference proceedings, .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558992351 1558992359 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Metallic films--Congresses<br/>Vapor deposition--Congresses<br/>Electrochemical metallizing--Congresses