01372nam a2200277 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245036700120260005700487300003300544490006600577504005200643650007800695650003100773650003300804650004400837700002200881700002600903700002200929710007700951830006601028vtls000060055KUKTEM20251125093413.0120522t1994    paua   f b    001 0 eng d  a9781558992351  a1558992359  aUMP00aAdvanced metallization for ULSI applications in 1993 :bproceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. /ceditors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike  aPittsburgh, PA :bMaterials Research Society,cc1994  axv, 611 p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedings,x1048-0854  aIncludes bibliographical references and indexes 0aIntegrated circuitsxUltra large scale integrationxMaterialsxCongresses 0aMetallic filmsxCongresses 0aVapor depositionxCongresses 0aElectrochemical metallizingxCongresses1 aFavreau, David P.2 aShacham-Diamand, Yosi1 aHoriike, Yasuhiro2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings,x1048-0854