01631nam a2200325 a 4500 vtls000060055 KUKTEM 20251125093413.0 120522t1994 paua f b 001 0 eng d 9781558992351 1558992359 201212031235 fauzi 201205221559 safura UMP TK7871.15.F5 A38 1994 Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike Pittsburgh, PA : Materials Research Society, c1994 xv, 611 p. : ill. ; 24 cm. Materials Research Society conference proceedings, 1048-0854 Includes bibliographical references and indexes Integrated circuits Ultra large scale integration Materials Congresses Metallic films Congresses Vapor deposition Congresses Electrochemical metallizing Congresses Favreau, David P. Shacham-Diamand, Yosi Horiike, Yasuhiro University of California, Berkeley. Continuing Education in Engineering Materials Research Society conference proceedings, 1048-0854 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7871.15.F5 A38 1994 0000068307 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 64416 64422 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*7000*7001*7002*7100*8300*9992