proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A Favreau, David P. Shacham-Diamand, Yosi Horiike, Yasuhiro University of California, Berkeley Continuing Education in Engineering text bibliography pau Pittsburgh, PA Materials Research Society c1994 1994 monographic eng

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xv, 611 p. : ill. ; 24 cm. specialized editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike Includes bibliographical references and indexes Integrated circuits Ultra large scale integration Materials Congresses Metallic films Congresses Vapor deposition Congresses Electrochemical metallizing Congresses 9781558992351 1558992359 UMP 120522 20251125093413.0 vtls000060055