TY  - BOOK
AU  - Favreau,David P.
AU  - 
AU  - Horiike,Yasuhiro
ED  - University of California, Berkeley.
TI  - Advanced metallization for ULSI applications in 1993: proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. 
T2  - Materials Research Society conference proceedings,
SN  - 9781558992351
PY  - 1994///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Congresses
KW  - Metallic films
KW  - Vapor deposition
KW  - Electrochemical metallizing
N1  - Includes bibliographical references and indexes
ER  -