01675nam a2200313 a 4500 vtls000059969 KUKTEM 20251125093413.0 120522t1998 paua f b 101 0 eng d 9781558994126 1558994122 201212031247 fauzi 201205221126 safura UMP TK7874.76 .A38 1998 Advanced metallization and interconnect systems for ULSI applications in 1997 : proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan / editors, Robin Cheung ... [et al.] Warrendale, Pa. : Materials Research Society, c1998 xviii, 765 p. : ill. ; 24 cm. Conference proceedings, 1048-0854 Includes bibliographical references and indexes Integrated circuits Ultra large scale integration Design and construction Congresses Integrated circuits Ultra large scale integration Materials Congresses Vapor-plating Congresses Electrochemical metallizing Congresses Dielectrics Congresses Cheung, Robin University of California, Berkeley. Continuing Education in Engineering Materials Research Society conference proceedings 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7874.76 .A38 1998 0000068303 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 64417 64423 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*7000*7100*8300*9992