Handbook of sputter deposition technology :  fundamentals and applications for functional thin films, nanomaterials, and MEMS / 
editors by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera 
 - 2nd ed. 
 - Waltham, MA :  William Andrew,  c2012 
 - xii, 644 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781437734836 1437734839 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cathode sputtering (Plating process)--Handbooks, manuals, etc.<br/>Thin films--Handbooks, manuals, etc.