00843nam a2200229 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245018900120250001200309260004200321300003400363504005000397650006700447650004100514700001900555700001700574700002200591vtls000067144KUKTEM20251125093430.0121128t2012    maua   f b    001 0 eng d  a9781437734836  a1437734839  aUMP00aHandbook of sputter deposition technology :bfundamentals and applications for functional thin films, nanomaterials, and MEMS /ceditors by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera  a2nd ed.  aWaltham, MA :bWilliam Andrew,cc2012  axii, 644 p. :bill. ;c24 cm.  aIncludes bibliographical references and index 0aCathode sputtering (Plating process)vHandbooks, manuals, etc. 0aThin filmsvHandbooks, manuals, etc.1 aWasa, Kiyotaka1 aKanno, Isaku1 aKotera, Hidetoshi