TY  - BOOK
AU  - Wasa,Kiyotaka
AU  - Kanno,Isaku
AU  - Kotera,Hidetoshi
TI  - Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nanomaterials, and MEMS 
SN  - 9781437734836
PY  - 2012///
CY  - Waltham, MA
PB  - William Andrew
KW  - Cathode sputtering (Plating process)
KW  - Handbooks, manuals, etc
KW  - Thin films
N1  - Includes bibliographical references and index
ER  -