@book{64973,
	author = {Cohen, J. David and Materials Research Society. and Symposium on Amorphous and Heterogeneous Silicon-Based Films},
	title = {Amorphous and heterogeneous silicon-based films--2002 :},
	publisher = {Materials Research Society,},
	year = {c2002},
	series = {Materials Research Society symposium proceedings ;},
	address = {Warrendale, Pa. :},
	note = {" ... Symposium A, 'Amorphous and Heterogeneous Silicon-Based Films--2002,' [was] held April 2-5 at the 2002 MRS Spring Meeting in San Francisco, California."--Pref.}
}