In-situ patterning :  selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / 
editors by  Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg 
 - Pittsburgh, PA :  Materials Research Society,  c1990 
 - xi, 496 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 158 .
 - Materials Research Society symposium proceedings .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781558990463 1558990461 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching--Congresses<br/>Semiconductor doping--Congresses<br/>Lasers--Industrial applications--Congresses<br/>Plasma etching--Congresses