TY  - BOOK
AU  - Bernhardt,Anthony F.
AU  - Black,Jerry G.
AU  - Rosenberg,Rosenberg
TI  - In-situ patterning: selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558990463
PY  - 1990///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Semiconductors
KW  - Etching
KW  - Congresses
KW  - Semiconductor doping
KW  - Lasers
KW  - Industrial applications
KW  - Plasma etching
N1  - Includes bibliographical references and index
ER  -