00995nam a2200253 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245018100120260005700301300003300358490006300391504005000454650006300504650003300567650003200600700001800632700001900650700001900669830005300688vtls000061813KUKTEM20251125093501.0120613t1989    paua   f b    001 0 eng d  a9781558990203  a1558990208  aUMP00aIon beam processing of advanced electronic materials :bsymposium held April 25-27, 1989, San Diego, California, U.S.A. /ceditors by N. W. Cheung, A. D. Marwick, J. B. Roberto  aPittsburgh, PA :bMaterials Research Society,cc1989  axi, 401 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 147  aIncludes bibliographical references and index 0aElectronicsxMaterialsxEffect of radiation onxCongresses 0aIon implantationxCongresses 0aIon bombardmentxCongresses1 aCheung, N. W.1 aMarwick, A. D.1 aRoberto, J. B. 0aMaterials Research Society symposium proceedings