TY  - BOOK
AU  - Cheung,N.W.
AU  - Marwick,A.D.
AU  - Roberto,J.B.
TI  - Ion beam processing of advanced electronic materials: symposium held April 25-27, 1989, San Diego, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558990203
PY  - 1989///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Electronics
KW  - Materials
KW  - Effect of radiation on
KW  - Congresses
KW  - Ion implantation
KW  - Ion bombardment
N1  - Includes bibliographical references and index
ER  -