Microelectromechanical systems--materials and devices III :  symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. / 
editors, Jörg Bagdahn ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2010 
 - ix, 211 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 1222 .
 - Materials Research Society symposia proceedings  v. 1222 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605111957 1605111953 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Materials--Congresses<br/>Microelectromechanical systems--Congresses<br/>Thin films--Congresses<br/>Nanostructured materials--Congresses<br/>Silicon--Congresses