TY  - BOOK
AU  - Bagdahn,Jörg
TI  - Microelectromechanical systems--materials and devices III: symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781605111957
PY  - 2010///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Microelectromechanical systems
KW  - Materials
KW  - Congresses
KW  - Thin films
KW  - Nanostructured materials
KW  - Silicon
N1  - Includes bibliographical references and indexes
ER  -