Niedermayer, Michael Cost-driven design of smart microsystems / Michael Niedermayer - Boston : Artech House, 2012 - xii, 229 p. : ill. ; 24 cm. - Artech House integrated microsystems series . - Artech House integrated microsystems series . Includes bibliographical references and index ISBN: 9781608070848 (hbk.) 1608070840 (hbk.) Subjects--Topical Terms: Microelectromechanical systems