Dorey, Robert A. <br/><br/>
Ceramic thick films for MEMS and microdevices / 
Robert A. Dorey 
 - Waltham, MA :  William Andrew,  2012 
 - xviii, 191 p. :  ill. ;  24 cm. 
 - Micro and nano technologies series .
<br/><br/>Includes bibliographical references (p. 183-185) and index 
<br/><br/><label>ISBN: </label>9781437778175 (hbk.) 1437778178 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thick-film circuits--Design and construction<br/>Microelectromechanical systems--Design and construction<br/>Nanoelectronics