TY  - BOOK
AU  - Dorey,Robert A.
TI  - Ceramic thick films for MEMS and microdevices
T2  - Micro and nano technologies series
SN  - 9781437778175 (hbk.)
PY  - 2012///
CY  - Waltham, MA
PB  - William Andrew
KW  - Thick-film circuits
KW  - Design and construction
KW  - Microelectromechanical systems
KW  - Nanoelectronics
N1  - Includes bibliographical references (p. 183-185) and index
ER  -