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  <titleInfo>
    <title>Nanoscaled semiconductor-on-insulator materials, sensors and devices</title>
    <subTitle>selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine</subTitle>
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  <name type="conference">
    <namePart>International Workshop on Semiconductor-on-Insulator Materials and Devices 2010 : Kiev, Ukraine)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Nazarov, A. N. (Alexei N.)</namePart>
  </name>
  <name type="personal">
    <namePart>Raskin, J.-P. (Jean-Pierre)</namePart>
    <namePart type="date">1971-</namePart>
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  <typeOfResource>text</typeOfResource>
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    <place>
      <placeTerm type="text">Durnten-Zurich, Switzerland</placeTerm>
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    <publisher>Trans Tech</publisher>
    <dateIssued>2011</dateIssued>
    <issuance>monographic</issuance>
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    <extent>x, 206 p. : ill. ; 25 cm.</extent>
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  <note type="statement of responsibility">edited by Alexei N. Nazarov and Jean-Pierre Raskin</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Silicon-on-insulator technology</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Nanoelectromechanical systems</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Nanotechnology</topic>
    <topic>Congresses</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Advanced materials research ; v. 276</title>
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  <identifier type="isbn">9783037851784 (pbk.)</identifier>
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