TY - BOOK AU - Nazarov,A.N. AU - Raskin,J.-P. ED - International Workshop on Semiconductor-on-Insulator Materials and Devices TI - Nanoscaled semiconductor-on-insulator materials, sensors and devices: selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine T2 - Advanced materials research, SN - 9783037851784 (pbk.) PY - 2011/// CY - Durnten-Zurich, Switzerland PB - Trans Tech KW - Semiconductors KW - Congresses KW - Silicon-on-insulator technology KW - Nanoelectromechanical systems KW - Nanotechnology N1 - Includes bibliographical references and index ER -