Kempe, Volker <br/><br/>
Inertial MEMS :  principles and practice / 
Volker Kempe 
 - Cambridge :  Cambridge University Press,  2011 
 - xiv, 475 p. :  ill. (some col.) ;  26 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/>Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index 
<br/><br/><label>ISBN: </label>9780521766586 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Inertial navigation systems<br/>BioMEMS