01163nam a2200253 a 4500 vtls000061732 KUKTEM 20251125093605.0 120612t2011 enka f 001 0 eng d 9780521766586 (hbk.) 201304261316 saini 201303271126 saini 201206121007 safura UMP TK7875 .K46 2011 Kempe, Volker Inertial MEMS : principles and practice / Volker Kempe Cambridge : Cambridge University Press, 2011 xiv, 475 p. : ill. (some col.) ; 26 cm. Includes bibliographical references and index Machine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index Microelectromechanical systems Inertial navigation systems BioMEMS 0 0 0 0 20000 20000 2019-09-04 355.79 0 TK7875 .K46 2011 0000071731 2019-09-04 00:00:00 1 355.79 2019-09-04 OPEN VIRTUA40 66163 66169 VTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*5050*6500*6501*6502*9992